My work is performed at the Washington Nanofabrication Facility, an open-access nanofabrication facility at the University of Washington. The WNF is part of the UW Institute for Nano-engineered Systems (NanoES) and the National Science Foundation’s National Nanotechnology Coordinated Infrastructure (NNCI). I can perform processes using virtually all tools available in the lab. Most tooling at the WNF is set up for 4"/100 mm wafer processing, with a few tools accommodating up to 6 or 8" wafers.
