R&D services for micro-electromechanical systems (MEMS)
McQuaide Microsystems specializes in MEMS hardware product development. I can bring your MEMS device from early concept digital layout form to wafer-level devices, or investigate processes for optimizing existing fabrication methods through short loops and design of experiments (DOEs).
R&D-level fabrication
Short loops/DOEs
One-off processes
My niche lies in taking a validated MEMS design concept (post FEM/simulation stage) and bringing it to reality at the wafer level through fabrication at my partner cleanroom, the Washington Nanofabrication Facility (WNF). I also specialize in executing short-loop fabrication services, designing experiments to hone in on the best process flow and creating a reliable traveler that can direct a MEMS fabrication engineer or technician through the full processing of your device. Finally, I can offer one-off services on any tools available in the cleanroom such as direct-write lithography, thin film deposition, etching, metrology, and more.
If you require help beyond what I can provide at our facility, I can connect you to my broader MEMS network offering design and modeling/FEM services, wafer dicing, packaging, testing, and foundry transfer.